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a bibo:Periodical;
dcterms:medium ;
rdau:P60049 ;
rdau:P60050 ;
rdau:P60048 ;
dc:identifier "(DE-101)012538868";
bibo:issn "0090-8541";
dc:identifier "(DE-600)442599-6", "(OCoLC)1367772948";
rdau:P60049 ;
rdau:P60327 "US Department of Commerce, National Bureau of Standards";
dc:title "Methods of measurement for semiconductor materials, process control, and devices";
rdau:P60128 "Nachgewiesen 9.1970,Juli/Sept.(1971) - 20.1973,Apr./Jan.";
dc:publisher "US Gov.Print.Off.";
rdau:P60163 "Washington, DC";
rdau:P60333 "Washington, DC : US Gov.Print.Off.";
rdau:P60278 ;
dcterms:relation ;
dc:subject "620"^^dnbt:ddc-subject-category;
wdrs:describedby .
dcterms:license ;
dcterms:modified "2022-09-03T07:39:57.000"^^xsd:dateTime .
dcterms:issued "1971-1973";
rdau:P60493 "quarterly report" .